CABINEX-EN2
CABIN EX-EN2 is an automatic CO2 fire extinguishing system that does not react chemically with the protected hazards nor leaves any residue thereon. Cabinex-EN2 provides effectiveness and safety.
Production Intro
Application:
Process | Process Equipment |
---|---|
Reticle Photo mask | • Reticle cleaning equipment |
Developing etching process |
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Wafer polishing process |
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Photo resist coating process |
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Oxide diffusion CVD ion implanting |
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Others |
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Machining tools |
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The advantage of Cabinex-EN2
- Cabinex-EN2 provides effectiveness and safety for semiconductor equipment and machine tools.
- No chemical reaction and no mechanical pollution.
- It is designed to protect industrial business equipment and machines for 24 hours.
- Long life time and the system material(CO2) could resistant acid and Alkali attack.
- Sensors with high reliability:multiple automatic detections can reduce errors from human operation.
Spec
CO2 Specification | Models | Dimensions (mm) | Weight | Fire extinguishing agent | Weight of fire extinguishing agent |
---|---|---|---|---|---|
Integrated Type | COX-3EN2 | 760*290*180 | 23kg | CO2 | 3.2kg |
COX-5EN2 | 1160*4000*300 | 35kg | CO2 | 4.6kg | |
COX-7EN2 | 920*320*215 | 37kg | CO2 | 6.8kg | |
COX-14EN2 | 1160*4000*300 | 86kg | CO2 | 14.0kg | |
COX-18EN2 | 1160*4000*300 | 90kg | CO2 | 18.0kg |
CO2 Specification | Models | Dimensions (mm) | Weight | Fire extinguishing agent | Weight of fire extinguishing agent |
---|---|---|---|---|---|
Seperate type control unit |
CPX-REN2 |
345*280*90 | 6kg | CO2 | n/a |
CPX-UEN2 (Embeded/standalone control panel) |
220*340*130 | 6.3kg | CO2 | n/a | |
COX-30ENA2 | 1755*400*330 | 140kg | CO2 | 30kg | |
COX-45ENA2 | 1915*525*380 | 180kg | CO2 | 45kg |
CO2 Specification | Models | Dimensions (mm) | Weight | Fire extinguishing agent | Weight of fire extinguishing agent |
---|---|---|---|---|---|
Seperate type control unit | COX-3ENS2 | 760*290*180 | 23kg | CO2 | 3.2kg |
COX-5ENS2 | 920*320*215 | 34kg | CO2 | 4.6kg | |
COX-7ENS2 | 920*320*215 | 84kg | CO2 | 6.8kg | |
COX-14ENS2 | 1160*4000*300 | 86kg | CO2 | 14.0kg | |
COX-18ENS2 | 1160*4000*300 | 88kg | CO2 | 18.0kg | |
COX-30ENA2-S | 1755*400*330 | 140kg | CO2 | 30kg | |
COX-45ENA2-S | 1915*525*380 | 180kg | CO2 | 45kg |
Product Contact
Charlies Chang
- TOPCO SCIENTIFIC CO.,LTD.
- Project Manager
- Sales Dept. I, Engineering Integration Div., 5th Business Unit
6F., No. 12, Industry E. 9th Rd., Science based Industrial park, Hsinchu City 300096, Taiwan
TEL: (03)564-2132 ext.3313