Hatata CO2 automatic fire extinguishing system CABINEX-EWT
HATSUTA’s CO2 fire fighting system provides pure and clean gas for fire extinguishing inside the machine, which can perform fire extinguishing function within 1 minute. Besides, after discharging, the automatic fire extinguishing system can recover protected equipment back to normal operating condition with lowest cost and in short time.
Production Intro
Application:
Process | Process Equipment |
Reticle Photo mask |
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Developing etching process |
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Wafer polishing process |
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Photo resist coating process |
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Oxide diffusion CVD ion implanting |
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Others |
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Cabinex-EWT is automatic fire extinguishing system(CO2) for Semiconductor and F.P.D Manufacturing Equipment.
- FM Approved.
- Compact and Slim.
- EWT control panel could check the below information:
- 100 history record. (abnormality, fault situation, alarm)
- Addressable points function.
- Remote monitor function.
- Clean efficient CO2 system:It is non-conductive and clean. After discharging CO2, there is little effect on the clean room environment and the protected equipment.
- No chemical reaction and no mechanical pollution.
- It is designed to protect industrial business equipment and machines for 24 hours.
- Long life time and the system material(CO2) could resistant acid and Alkali attack.
- Sensors with high reliability:multiple automatic detections can reduce errors from human operation.
- High cost performance:After discharge, the automatic fire extinguishing system could save time and cost to recover equipment.
CO2 Specification | Models | Dimensions | Weight | Fire extinguishing agent | Weight of fire extinguishing agent |
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Integrated Type | COX-50EWT | 1,530*500*370 | 170kg | CO2 | 22.7kg (50LB) |
COX-100EWT | 1,980*550*400 | 270kg | CO2 | 45.4kg (100LB) |
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COX-100EWT-W | 1980*850*400 | 400kg | CO2 | 45.4kg (100LB)*2 |
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Seperate type control unit | COX-50EWT-S | 1530*500*370 | 155kg | CO2 | 22.7kg (50LB) |
COX-100EWT-S | 1980*550*400 | 255kg | CO2 | 45.4kg (100LB) |
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COX-100EWT-WS | 1980*850*400 | 385kg | CO2 | 45.4kg (100LB)*2 |
Product Contact
Charlies Chang
- TOPCO SCIENTIFIC CO.,LTD.
- Project Manager
- Sales Dept. I, Engineering Integration Div., 5th Business Unit
6F., No. 12, Industry E. 9th Rd., Science based Industrial park, Hsinchu City 300096, Taiwan
TEL: (03)564-2132 ext.3313